User Fees - Micro and Nano Systems

Micro and Nano Systems Laboratory

User Fees

	Equipment drive
	Nanoimprint Lithography System
	Scanning Acoustic Microscope
	Biomolecule Write System (User supplies cartridge)
	FTIR
	Pick and Place System
	Electroplating System (User supplies consumables)
	Nano-Bonding and Interconnect System (User supplies bonding jigs)
	Plasma Surface Activated Bonder
	X-ray Photoelectron Spectroscopy
	Scanning Electron Microscope
	Dynamic Ultra Micro Hardness Tester
	Nanogrowth and Hybrid Plasma Etching System
	Hybrid Metallization and Roll-to-Roll Bonding System
	Wafer Thickness Mapping System
	Atomic Force Microscope
	Drop Shape Analysis System
	Multifunctional Bond Tester
	Convertible Wire Bonder
	Universal Tensile Pulling Testing Machine
	Automatic Dicing Saw
	Chemical Mechanical Polishing Equipment
	MultiPrep Polishing System
	Gel Permeation Chromatography HPLC System
	Thermal Gravimetric Analyzer
	High Temperature and Controlled Humidity Testing Chamber

	Equipment drive
	Electrical equipment, DC instruments (incl. oscilloscopes < 1GHz)
	Electrical equipment, DC instruments, accessories
	Electrical equipment, RF instruments (incl. oscilloscopes > 1GHz)
	Electrical equipment, RF instruments, accessories
	Optical equipment, free space on optical table
	Optical equipment, free space, accessories
	Optical equipment, fiber-coupled
	Optical equipment, fiber-coupled, accessories
	Probe station, non-cryogenic
	Probe station, cryogenic (liquid nitrogen or helium extra)
	Probe station, DC accessories
	Probe station, RF accessories (if user did not provided them)
	Probe station, optic accessories
	Micro-fluidic probe station with general accessories and imaging

User Fees